Speaker
Martin Wünsche
(Friedrich Schiller University Jena)
Description
We present XUV Coherence Tomography (XCT) driven by a high-harmonic light source. Using a novel One-dimensional phase retrieval algorithm, XCT enables non-destructive, artifact-free, nanoscale, cross-sectional imaging of silicon based samples, e.g., semiconductor devices.
Authors
Martin Wünsche
(Friedrich Schiller University Jena)
Silvio Fuchs
(Friedrich Schiller University Jena)
Jan Nathanael
(Friedrich Schiller University Jena)
Johann J. Abel
(Friedrich Schiller University Jena)
Julius Reinhard
(Friedrich Schiller University Jena)
Felix Wiesner
(Friedrich Schiller University Jena)
Slawomir Skruszewicz
(Friedrich Schiller University Jena)
Christian Rödel
(Friedrich Schiller University Jena)
Gerhard G. Paulus
(Friedrich Schiller University Jena)
